Noohapou Fundamentals Explained

Noohapou Fundamentals Explained

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Remote places: Static models are usually located remotely, expanding Charge and reducing In general method effectiveness.

Resource & TCU software calibration strategies range exterior examination gear not made use of on a regular basis for verifying

Using the POU3500, you'll be able to reach unparalleled ends in etch efficiency, chamber uptime, decreased price of possession and fab Place utilization – all whilst improving your approach trustworthiness.

We embrace personalized accountability and take responsibility for prudent threat using. We encourage individual values, which manual us to constantly meet up with the commitments we make and we endeavor to deal with Those people with whom we connect with regard as we desire to be taken care of ourselves.

LAUDA-Noah will, for the buyer's retrofit evaluation, keep an eye on and change its fluid temperature Handle profiles to match an existing TCUs' if you want to guarantee a sleek method integration through DAQ.

The accuracy from the POU 3300 allows for independent Charge of the procedure fluid temperature towards the wafer chuck in just +/- 0.one °C of established level, as well as rapidly response time with the technique lets for optimum wafer-to-wafer repeatability all through the etch approach.

All static TCUs involve surplus cooling & heating capacities because of their extremely substantial process fluid reservoirs. the method fuid reservoir on LAUDA-Noah's dynamic temperature Manage technique is a lot less than 1 gallon.

With the POU3300, it is possible to achieve unparalleled results in etch effectiveness, chamber uptime, reduced cost of possession and fab Area utilization – all although bettering your approach reliability.

The data pertains into a 300mm chamber temperature profile in the course of a large aspect ratio Etch approach, functioning at quite superior RF electricity ailments (~3.8kW). The powerful facets of this details set are:

LAUDA-Noah is Conference these new troubles and has included energy preserving engineering in methods that are pleasant to your environment and possess a low cost to operate.

the information set here is from the 200mm quantity manufacturing wafer fab and Evidently illustrates the benefit of the LAUDA-Noah POU technique.

a lot more than ever, shrinking system geometries, demanding new procedures as well as a extremely competitive atmosphere involve temperature Manage devices that Mix speedy and accurate temperature Manage having an emphasis on decreased operating expenses and enhanced reliability.

The reality is real Dynamic Temperature Control can only be reached when all 5 (five) of get more info the subsequent process style and design and installation prerequisites are met:

(thus, putting in a static unit next to chamber won't help it to provide dynamic temperature Command)

We demand significantly less cooling/heating ability for the same software as a static TCU due to our modest reservoir quantity.

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